Sunday, 1 November 2026
Standing Office 81 (SOVNPA 81) emblem Viet Nam NVietnam National Presiding Agency
on Countering the Proliferation of Weapons of Mass Destruction
Standing Office 81

3D003'Computational lithography' "software" specially designed for the "development" of patterns on EUV-lithography masks or reticles.

List
EU dual-use list – Annex I to Regulation (EU) 2021/821, updated annually
Originating regime
Thỏa ước Wassenaar
Technical Note:
For the purposes of 3D003, 'computational lithography' is the use of computer modelling to predict, correct, optimise and verify imaging performance of the lithography process over a range of patterns, processes, and system conditions.